FS70 Series Microscope for Semiconductor Inspection

Mitutoyo FS70 Ergonomic High Power Microscope

FS70 Special Features:

Erect Image Trinocular (50/50,100/100), Erect Image Tilting Trinocular (50/50)
Mitutoyo Infinity Corrected Optics
Siedentopf Design Trinocular Body Tube
Widefield (FN=24) 10x Eyepieces
Three Main Body Types:
- FS70Z - Main Body (Non-Laser) with 1X-2X Zoom Magnification Changer
- FS70L - Main Body 1X for Three YAG Laser Wave lengths 1064/532/355nm*
- FS70L4 - Main Body 1X for Two Wave Length Ranges 532/266nm*
Brightfield Objective Magnification Selections from 1X to
200X
Extra Long Working Distance Plan Apochromat Objectives
Laser Cutting Objectives
Long Working Distance Plan Objectives for IR, NIR, UV and NUV applications
Differential Interference Contrast (DIC) Option for Nonlaser Configurations
Reverse 4X Nosepiece
Optional Motorized 4X Centerable Nosepiece
Six foot Cable Remote Intensity Control for Fiber Optic Illuminator
Concentric Coarse and Fine Focus –0.1mm Rev /Fine Focus
Manual Focus Block or Optional Motorized Focus Block
Probe Station Ready with Choice of Focusing Blocks

Technical Data

Focus adjustment

Method: With concentric coarse and fine focusing wheels (right and left)
Range: 50mm travel range0.1mm/rev. for fine adjustment, 3.8mm/rev. for coarse adjustment

Trinocular tube Image: Erect image

Pupil distance: Siedentopf type, adjustment range: 51 - 76mm

Field number: 24

Tilt angle: 0º - 20º (only -TH, -THS models)

Illumination system: Reflective illumination for bright field (Koehler illumination, with aperture diaphragm)

Light source: 12V100W fiber optics, non-stepped adjustment), light guide length 1.5m, power consumption 150W

Objectives (optional): M Plan Apo-4, M Plan Apo SL, G Plan Apo