Process Chamber Assurance Tool (CAT)

Manufacturer: Lucas Labs

The CAT uses Rate of Rise methodology and applies the gas laws to test vacuum based process tools. Pressure sensors, Mass Flow Controllers, Vacuum Pump performance and Chamber Integrity.

Florizel Automatic MFC Tester

Manufacturer: Lucas Labs

The Florizel Automatic MFC Tester is based upon the same theory of operation as the VDS and is used for off-line testing of mass flow controllers. Up to 8 MFC's can be tested in one unattended automatic cycle.

Vacuum Diagnostic System

Manufacturer: Lucas Labs

The Vacuum Diagnostic System (VDS) is used for the rapid in-situ characterization of the entire gas handling subsystem of vacuum process equipment such as plasma etching systems, chemical vapor deposition systems, etc.

The Calibration Compensation Module

Manufacturer: Lucas Labs

The Calibration Compensation Module mounts into the control line of an MFC and permits online calibration of analog MFCs. The Calibration Readout Unit is a custom designed meter used to perform the adjustment of the Calibration Compensation Module.

Resistivity Equipment

Manufacturer: Lucas Labs

Semiauto & Manual Four Point Probes, Resistivity Mapping Software, Probe Heads, up to 300mm