Four Point Probes Division
PO Box 9275, Chandler Heights AZ, 85127, USA Tel: (480) 988-2256 Fax: (480) 452-0172 E-mail: sales@bridgetec.com

Mini Magnetron Sputtering System

Mini Magnetron Sputtering System

Mini Rapid Thermal Evaporator

Model No : M/N : AP-MMS1

Download brochure for mini-magnetron sputtering system

A. Feature of Magnetron Sputtering System

  • Deposition thickness : Customer specified
  • Deposition material : Metals
  • Film thickness uniformity : = ± 5 % on 4" substrate ( When choosing Option 2 )
  • Deposition : deposition by DC magnetron sputtering method
  • Throughput : up to 4" substrate x 1 sheet / batch
  • Vacuum : Ultimate pressure 1.0 x 10 -3 Torr / Base pressure 2.0 x 10-2 Torr
  • Vacuum chamber : process chamber
  • Control system : Manual control
  • Purpose : Research and development

B. Specifications

1. Vacuum chamber module

1) Process chamber

  • Chamber : stainless steel body with a hinged top door type, ID250 x H300 mm
  • Ports : Pumping, venting, gauge, window, sputtering gun(1set) , gas supply, valves, etc

2) Substrate holder module

  • Substrate holder for 4 inch substrate
  • Sample (un)loading : Manual
  • Substrate rotation & controller : 0 ~ 10rpm (Option 1)

2. Vacuum module

1) Vacuum pumps

  • Oil rotary pump (150 l/min) 1set, Oil Diffusion pump (215 l/sec) 1set

2) Vacuum valves and pumping lines

  • NW25, Right angle valve for Roughing pumping
  • Venting valve, Pumping lines(NW25), etc.

3) Vacuum measurement

  • Low vacuum gauge sensor, 1ea

3. Magnetron sputtering module

1) Magnetron sputtering cathode, 1set

  • Target size : 2 inch diameter or 3 inch diameter (Option 2)
  • Cooling : Internal to backing plate
  • Manual shutter
  • Fixed angle

1) DC power supply, 1set

  • 2 kW (800V – 2.5A), DC Sputtering power supply, 1set
  • cable : M-N type

4. Gas delivery module

  • MFC : Ar(100sccm) for sputtering process
  • Read/out box : 1 channel, 1set
  • Gas valve : Ball valve (manual type), A-lock fitting
  • Gas line & Fitting : EP grade SUS tube, A-lock fitting

5. Frame

  • Frame size : 650(W) x 900(D) x 900(H) mm
  • Painted profiled mild steel
  • The whole machine is covered with paint removable panels
  • The frame is also equipped with adjustable legs

6. Facilities (Customer side)

  • Water flow system with purging valve
  • Electric power requirements : AC 220V, 20A (about max. 4 kW)
  • Gas requirements
    • Argon gas for sputtering process, 99.9%, regulator, A-lock fitting
  • Exhaust line NW25 for roughing pump
  • Sputtering target : 2" or 3" target (option) with thickness 6.35mm

C. Warranty

  • During one-year period, Manufacturer warrants for repair all faulty equipment without charge except that improper operation, maintenance and handling by the customer. All consumable materials are entirely excluded from warranty.

D. Delivery

  • Normally 8 weeks after PO