OPTOPro Model 622-A

Research Grade 3D MEMS Optical Profiler System

OPTOPro Model 622-A Research Grade 3D MEMS Optical Profiler System

 

The Model 622-A is a research grade, long working-distance 3D MEMS profiler based on patented long working-distance interference microscope technology. This instrument is suitable for three-dimensional imaging and metrology of micro-electro-mechanical (MEMS) devices and test structures and includes a custom micro-electronics probe station. The long working-distance allows standard probes or probe cards to be used. This enables nanometer-scale 3-D height profiles of MEMS test structures to be acquired across an entire wafer with optional long travel sample stages.

 

The instrument is supported by a vibration isolation base and comes with two left hand, vacuum base probe micropositioners and two right-hand, vacuum base probe micropositioners.  The standard light source is a green incoherent light emitting diode (LED).  The standard video camera is a  2/3-inch black & white CCD camera.  The image processing system consists of a National Instruments analog output board, an IMAQ Vision Deploy Engine and an IMAQ PCI-1409 and NI-IMAQA.  A computer with monitor and keyboard is provided as well as a second monitor to view the video output from the camera.

 

 

MEMScript™ Interpretive Scripting Environment Software

 

MEMScript™ software, which is an interpretive scripting environment will be provided.  The MEMScript™ Software has several unique features.  In addition to analysis features, MEMScript™ also has the ability to control MEMS devices and make real time measurements of performance.  Important MEMScript™ functions include:

 

MEMScript for Optical Profilers
  • Pattern matching using sub-pixel interpolation
  • Phase shifting interferometry (PSI)
  • Arbitrary waveform output (up to 1 million samples per second for 8 channels)
  • Decision making capability (full logical branching)
  • Stroboscopic imaging capabilities
  • Concise user interface
  • Light source brightness auto-setting
  • GPIB capabilities to interface with external equipment
  • Serial port capabilities to interface with external equipment

 

A number of higher level macros, which serve as both example code and as useful libraries, are also furnished with the software.