INFRATEC-1 Backside Imaging Microscope

Infratec-1 Backside Imaging Microscope
Validation of backside sample prep & substrate thickness

Infratec-1 Backside Imaging Microscope

NFRATEC-1 allows for fast, convenient backside imaging in the sample preparation laboratory. Validation of sample preparation and remaining silicon thickness can be obtained without moving the sample to an emission or other backside microscope.

 

INFRATEC-1 reaches maximum functionality when used with ULTRA TEC's  ASAP-1 Selected Area Preparation System -- The sample mounting plate (pictured below) can be conveniently transferred between INFRATEC-1, ARC-lite and ASAP-1

 

Imaged part under 20x objective,
processed by ASAP-1 and ARC-lite

Picture shows INFRATEC's advanced X-Y table
that accepts sample mounting plates
directly from ASAP-1 and ARC-lite selected area
preparation machines.

 

Product Highlights

  • Imaging integration from 0.1 to 15 seconds ensures imaging effectiveness

  • Uses standard mounting plates from SAP products for ease of transfer between equipment

  • Small footprint can be positioned in sample prep lab for convenience

  • Inexpensive -- affordable for every lab

  • Focal Depth Measurement - accurate focus block allows for easy determination of remaining silicon thickness.

 

Order Codes

Part # Product
6420.1 INFRATEC-1 Microscope System, supplied with 10x broadband objective, integration control and NIR light source (110V to 240V input)
6443.1 13" Monitor (NTSC)
6444.1 4" low-res 'in-situ' monitor (NTSC)
6446.1 PC Video Card and software 
6462.1 2.5x Objective lens
6465.1 5x Objective Lens
6402.1 20x Objective lens
6465.1 50x objective lens
6410.1 100x Objective lens

 

Resources:

 

Download the INFRATEC-1 Datasheet (1.3M PDF file)

 

Find out more about ASAP-1

 

Find out more about ARC-lite